Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust lines-Reference-Cited by-同舟云学术

Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust lines

Published:2020-05 Issue: Volume:65 Page:104127
ISSN:0950-4230
Container-title:Journal of Loss Prevention in the Process Industries
language:en
Short-container-title:Journal of Loss Prevention in the Process Industries

Author:

Nguyen Thanh-Trung,Lin Yu-Jhen,Chin Mo-Geng,Wang Cheng-Chieh,Tsai Hsiao-Yun,Chen Jenq-Renn,Ngai Eugene Y.,Chacon Jennyfer,Franzi Albert,Fifield Christian,Baylor Jason,Marci John,Bitner Justin,Prettyman Kevin M.,Ferrera Nicholas,Jordon William,Szekeres Trevor

Funder

Global Foundries

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Energy Engineering and Power Technology,Safety, Risk, Reliability and Quality,General Chemical Engineering,Food Science,Control and Systems Engineering

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