Nine-fold density multiplication of hcp lattice pattern by directed self-assembly of block copolymer-Reference-Cited by-同舟云学术

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Nine-fold density multiplication of hcp lattice pattern by directed self-assembly of block copolymer

Published:2009-08 Issue:17 Volume:50 Page:4250-4256
ISSN:0032-3861
Container-title:Polymer
language:en
Short-container-title:Polymer

Author:

Tada Yasuhiko,Akasaka Satoshi,Takenaka Mikihito,Yoshida Hiroshi,Ruiz Ricardo,Dobisz Elizabeth,Hasegawa Hirokazu

Publisher

Elsevier BV

Subject

Polymers and Plastics,Materials Chemistry,Organic Chemistry

Reference35 articles.

1. Smith BW, Bourov A, Kang H, Cropanese F, Fan Y, Lafferty N, Zavyalova, L. Proc SPIE 2004;273:5377.

2. Nanofabricated and self-assembled magnetic structures as data storage media

3. Radiolysis and resolution limits of inorganic halide resists

4. Comparison of MIBK/IPA and water/IPA as PMMA developers for electron beam nanolithography

5. Challenges in 1 Teradot∕in.[sup 2] dot patterning using electron beam lithography for bit-patterned media

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4. Well-ordered self-assembled nanostructures of block copolymer films via synergistic integration of chemoepitaxy and zone annealing;Physical Chemistry Chemical Physics;2018

5. Structural Analyses of Blockcopolymer/Homopolymer Blends in Thin Films Using GI-SAXS;KOBUNSHI RONBUNSHU;2017

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