Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives-Reference-Cited by-同舟云学术

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Atomic-scale surface of fused silica induced by chemical mechanical polishing with controlled size spherical ceria abrasives

Published:2023-01 Issue: Volume:85 Page:783-792
ISSN:1526-6125
Container-title:Journal of Manufacturing Processes
language:en
Short-container-title:Journal of Manufacturing Processes

Author:

Xu Guanghong,Zhang Zhenyu,Meng Fanning,Liu Lu,Liu Dongdong,Shi Chunjing,Cui Xiangxiang,Wang Jianmei,Wen Wei

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference52 articles.

1. Effect of surface hydroxylation on ultra-precision machining of quartz glass;Guo;Appl Surf Sci,2020

2. Three-dimensional printing of transparent fused silica glass;Kotz;Nature,2017

3. Glassomer-processing fused silica glass like a polymer;Kotz;Adv Mater,2018

4. Full-silica metamaterial wave plate for high-intensity UV lasers;Bonod;Optica,2021

5. Immersion lithography: photomask and wafer-level materials;French;Annu Rev Mater,2019

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of core–shell SiO2@A-TiO2 abrasives and novel photocatalytic chemical machinal polishing for atomic surface of fused silica;Applied Surface Science;2024-04

2. The influence of CeO2 abrasive size on the performance of photocatalytic assisted chemical-mechanical polishing by Y/Pr co-doping strategy;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2024-03

3. Development of mesoporous abrasives and its unprecedented polishing performance elucidated by a novel atomic model;Materials Today Sustainability;2024-02

4. A Review of Emerging Technologies in Ultra-Smooth Surface Processing for Optical Components;Micromachines;2024-01-25

5. Atomic surface of quartz glass induced by photocatalytic green chemical mechanical polishing using the developed SiO₂@TiO₂ core–shell slurry;Nanoscale Advances;2024

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