Silica-assisted fixed agglomerated diamond abrasive polishing
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management
Reference38 articles.
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4. Planarization machining of sapphire wafers with boron carbide and colloidal silica as abrasives;Hu;Appl Surf Sci,2009
5. Study on planarization machining of sapphire wafer with soft-hard mixed abrasive through mechanical chemical polishing;Xu;Appl Surf Sci,2016
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