Ultra-precision raster grinding of monocrystalline silicon biconical free-form optics using arc-shaped diamond grinding wheels

Author:

Wang Sheng,Zhao Qingliang,Guo Bing,Pan Yongcheng

Funder

National key R & D Program of China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference26 articles.

1. Manufacturing and measurement of freeform optics;Fang;CIRP Ann Manuf Technol,2013

2. Freeform surface Characterisation-A fresh strategy;Jiang;CIRP Ann Manuf Technol,2007

3. An accurate interpolator for FTS diamond turning of optical free-form surface;Hu;Int J Adv Manuf Technol,2014

4. Study of tool paths calculated by different commercial CAM systems and influences on the real machining time and surface roughness for milling free‑form geometries;de;J Braz Soc Mech Sci Eng,2019

5. Optimization of tool path for uniform scallop-height in ultra-precision grinding of free-form surfaces;Chen;Nanomanuf Metrol,2019

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