Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics-Reference-Cited by-同舟云学术

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Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics

Published:2023-06 Issue: Volume:96 Page:125-137
ISSN:1526-6125
Container-title:Journal of Manufacturing Processes
language:en
Short-container-title:Journal of Manufacturing Processes

Author:

Yu Mingxin,Du Liqun,Zhai Ke,Cheng Haohao,Wang Fenglai,Li Aoqi,Wang Zhongmin

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

National Key Laboratory Foundation of China

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Reference39 articles.

1. Review-through-mask electrochemical micromachining;Baldhoff;J Electrochem Soc,2018

2. Electrochemical micromachining of microgroove arrays on phosphor bronze surface for improving the tribological performance;Zhou;ChinJ Aeronaut,2018

3. Through-mask electrochemical micromachining of micro pillar arrays on aluminum;Sun;Surf Coat Technol,2020

4. Applications of laser lithography on oxide film to titanium micromachining;Chauvy;Appl Surf Sci,2003

5. Sandwich-like electrochemical micromachining of micro-dimples using a porous metal cathode;Zhang;Surf Coat Technol,2017

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of high-density micro column chip mould using micro electroforming technology assisted by megasonic field and electrochemical etching;Chemical Engineering Journal;2024-09

2. Etching uniformity study of mask electrolyte jet machining based on mass transfer coefficient: 3D simulation and experimental validation;Journal of Manufacturing Processes;2024-06

3. Experimental Research of Ultrasonic Cavitation Evolution Mechanism and Model Optimization of RUREMM on Cylindrical Surface;Processes;2024-04-27

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