Deposition mechanism of cubic boron nitride
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials
Reference45 articles.
1. Effects of a Negative Self-Bias on the Growth of Cubic Boron Nitride Prepared by Plasma Chemical Vapor Deposition
2. Growth of cubic boron nitride on diamond particles by microwave plasma enhanced chemical vapor deposition
3. Growth of cubic boron nitride from vapor phase
4. Growth mechanism of cubic boron nitride in a r.f. glow discharge
5. M. Kuhr, S. Reinke, W. Kulisch,Surf. Coat. Technol. in press.
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1. Synthesis and Characterization of Nanocrystalline Boron-Nitride Thin Films by Ion Milling and Thermal Treatment for Tribological Coatings: An Approach to Quantifying the Growth Dynamic Process;Materials;2022-02-25
2. Electrical insulation characteristics of metal-insulator-metal structures using boron nitride dielectric films deposited with low-energy ion impact;Materials Science in Semiconductor Processing;2021-01
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4. Lowering of the Substrate Bias Voltage for Deposition of Cubic Boron Nitride in Microwave Plasma;IEEE Transactions on Plasma Science;2019-02
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