Deposition of non-graphitic carbon films by low carbon particle energies

Author:

Ullmann J.,Schmidt G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Proc. NATO-advanced study institute, Diamond and Diamond-like Films and Coating,1990

2. Proc. 1st European Conference on Diamond and Diamond-like Carbon Coatings,1991

3. Mass‐separated negative‐ion‐beam deposition system

4. Preparation and structure of carbon film deposited by a mass‐separated C+ion beam

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