Effects of fluorine implantation into a-C:H thin films-Reference-Cited by-同舟云学术

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Effects of fluorine implantation into a-C:H thin films

Published:1993-03 Issue:2-4 Volume:2 Page:580-583
ISSN:0925-9635
Container-title:Diamond and Related Materials
language:en
Short-container-title:Diamond and Related Materials

Author:

Wong S.P.,Peng Shaoqi,Ke Ning,Li Pengxu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanical Engineering,General Chemistry,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Preparation and properties of amorphous carbon

2. Amorphous carbon

3. The electrical and optical properties of amorphous carbon prepared by the glow discharge technique

4. Electrical and optical properties of hydrogenated amorphous carbon films

5. NMR study of 11B in magnetic superconductor ErRh4B4

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon;MRS Proceedings;2015

2. Deposition, structure and tribological behavior of silver–carbon nanocomposite coatings;Diamond and Related Materials;2013-10

3. Characteristics and mechanism of inductive coupled plasma etching of hydrogenated amorphous silicon carbide films;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003

4. Structural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing;Diamond and Related Materials;2000-09

5. Effects of high energetic He+ ion irradiation on the structure of polymeric hydrogenated amorphous carbon;Microelectronics Journal;1999-08

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