Structure of amorphous hydrogenated carbon film prepared from rf plasma deposition
Author:
Publisher
Elsevier BV
Subject
General Chemistry,General Materials Science
Reference23 articles.
1. Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma
2. The deposition of hard surface layers by hydrocarbon cracking in a glow discharge
3. The electrical and optical properties of amorphous carbon prepared by the glow discharge technique
4. Diamond-like carbon films produced in a butane plasma
5. Electrical and optical properties of hydrogenated amorphous carbon films
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2. Structure of hydrogenated diamond like carbon by Micro-Raman spectroscopy;Materials Letters;2012-03
3. Molecular Dynamical Simulations on a-C:H Film Growth from C and H Atomic Flux: Effect of Incident Energy;Chinese Physics Letters;2010-08
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5. Carbons;Handbook of Heterogeneous Catalysis;2008-03-15
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