1. Annual Book of ASTM Standards 1981 Standard practice for preparing an optical microscope for dimensional measurements, F728–81. American Society for Testing and Materials, Philadelphia, PA
2. Improved accuracy for SEM linewidth measurements;Atwood;Proc. Soc. Photo-Opt. Instrum. Eng.,1991
3. Microelectronic test chips for VLSI electronics;Buehler,1983
4. Bridge and van der Pauw sheet resistor for characterizing the line width of conducting layers;Buehler;J. Electrochem. Soc.,1978
5. The split-cross-bridge resistor for measuring the sheet resistance, linewidth, and line spacing of conducting layers;Buehler;IEEE Trans. Electron Devices,1986