1. “Dose Accuracy and Doping Uniformity of Ion Implantation Equipment.”;Perloff;Solid State Tech.,1981
2. “Advances in Sheet Resistance Measurements for Ion Implant Monitoring.”;Keenan;Solid State Tech.,1985
3. Semiconductor and Integrated Circuit Fabrication Techniques;Gise,1979
4. Introductory Materials Science;Starfield,1972
5. Handbook of Thin Film Technology;Maissel,1983