Substrate dependent mobility and strain effects for silicon and SiGe transistor channels with HKMG first stacks

Author:

Flachowsky S.,Herrmann T.,Höntschel J.,Illgen R.,Ong S.Y.,Wiatr M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. CMOS circuit performance enhancement by surface orientation optimization;Chang;IEEE Trans Electron Devices,2004

2. Mobility improvement for 45nm node by combination of optimized stress control and channel orientation design;Komoda;IEDM,2004

3. Physics of strain effects in semiconductors and metal-oxide-semiconductor field-effect transistors;Sun;J Appl Phys,2007

4. Strained SiGe channels for band-edge PMOS threshold voltages with metal gates and high-k dielectrics;Gilmer;IEEE Trans Electron Devices,2010

5. SiGe channels for higher mobility CMOS devices;Naumann;Mater Res Soc Sympos Proc,2010

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