Author:
Afridi M.,Hefner A.,Berning D.,Ellenwood C.,Varma A.,Jacob B.,Semancik S.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Gaitan M, Suehle JS, Cavicchi RE, Semancik S. Micro-hotplate devices and methods for their fabrication. US Patent 5,464,966. 1994
2. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing;Suehle;IEEE Electron Device Lett,1993
3. Afridi MY, Suehle JS, Zaghloul ME, Berning DW, Hefner AR, Semancik S, et al. A monolithic implementation of interface circuitry for CMOS compatible gas-sensor system. In: Proceedings of the IEEE Internal Symposium on Circuit and Systems, vol. 2, 2002. p. 732–5
4. Hybrid postprocessing etching for CMOS compatible MEMS;Tea;J. Microelectromech. Syst,1997
5. Afridi M, Berning D, Hefner A, Suehle J, Zaghloul M, Kelley E, et al. Transient heating study of microhotplates by using a high-speed thermal imaging system. In: Conference Proceedings of Eighteenth Annual IEEE Semiconductor Thermal Measurement and Management Symposium. 2002. p. 92–8
Cited by
37 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献