Integrated on-chip solid state capacitor based on vertically aligned carbon nanofibers, grown using a CMOS temperature compatible process
Author:
Funder
Smoltek AB
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
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4. Saleem AM, Andersson R, Song B, Wong CP, Desmaris V. On-chip integrated solid-state micro-supercapacitor. In: 67th electronic components and technology conference (ECTC), IEEE; 2017. p. 173–8. doi: https://doi.org/10.1109/ECTC.2017.135.
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