Statistical device simulation of physical and electrical characteristic fluctuations in 16-nm-gate high-κ/metal gate MOSFETs in the presence of random discrete dopants and random interface traps

Author:

Li Yiming,Cheng Hui-Wen

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Moore G. Progress in digital integrated electronics. In: Proceeding of IEEE international electron devices meeting technical digest. USA: 1975. p. 11–13.

2. Process technology variation;Kuhn;IEEE Trans Electron Dev,2011

3. Process–variation effect, metal-gate work-function fluctuation, and random-dopant fluctuation in emerging CMOS technologies;Li;IEEE Trans Electron Dev,2010

4. Discrete dopant fluctuations in 20-nm/15-nm-gate Planar CMOS;Li;IEEE Trans Electron Dev,2008

5. Simulation of characteristic variation in 16-nm-gate finFET devices due to intrinsic parameter fluctuations;Li;Nanotechnology,2010

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