A novel thermal switch and variable capacitance implement by CMOS MEMS process approaching in micro electrostatic converter

Author:

Chiou Jin-Chern,Chou Lei-Chun,Lai You-Liang,Huang Sheng-Chieh

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. Lai YL, Juang YZ, Huang SC, Tseng SH, Tsai HH. Effective mechanical properties measurements in standard CMOS process. In: Asia-Pacific conference on transducers and micro-nano technology [APCOT2010], Perth, WA, June 2010. p. 126.

2. Oz A. Fedder GK. RF CMOS-MEMS capacitor having large tuning range. In: Proc. 2003 IEEE international conference on solid-state sensors and actuators [Transducers ‘03], Boston, MA, June 2003. p. 851–4.

3. Oz A, Fedder GK. CMOS/BiCMOS self assembling and electrothermal microactutors for tunable capacitors, gap-closing structures and latch mechanisms 2004. In: Solid-state sensor, actuator and microsystems workshop, Hilton Head Is., SC. p. 212–5.

4. Materials science and engineering: an introduction;Callister,1997

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