Integration of buried insulators with high thermal conductivity in SOI MOSFETs: Thermal properties and short channel effects

Author:

Bresson N.,Cristoloveanu S.,Mazuré C.,Letertre F.,Iwai H.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Device design considerations for double-gate, ground-plane, and single-gated ultra-thin SOI MOSFET’s at the 25nm channel length generation;Wong;IEDM Tech Dig,1998

2. Applications of aluminium nitride films deposited by reactive sputtering to silicon-on-insulator materials;Bengtsson;Jpn J Appl Phys,1996

3. Deep-submicrometer channel design in silicon-on-insulator (SOI) MOSFET’s;Su;IEEE Electron Dev Lett,1994

4. Electrical characterization of SOI materials and devices;Cristoloveanu,1995

5. Oshima K, Cristoloveanu S, Guillaumot B, Carval GL, Iwai H, Mazure C, et al. Replacing the BOX with buried alumina: improved thermal dissipation in SOI MOSFETs. In: Electrochem Soc Proc Series PV 2003–05. Pennington, NJ, 2003. p. 45.

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