Modeling and control of threshold voltage based on pull-in characteristic for micro self-locked switch
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. RFMEMS, theory, design, and technology;Rebeiz,2003
2. Tuning in to RF MEMS;Rebeiz;IEEE Microw Mag,2009
3. Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application;Deng;Microsyst Technol,2016
4. Fabrication of low pull-in voltage RF MEMS switches on glass substrate in recessed CPW configuration for V-band application;Jaibir;J Micromech Microeng,2012
5. A high-power temperature-stable electrostatic RF MEMS capacitive switch based on a thermal Buckle-beam design;Mahameed;J Microelectromech Syst,2010
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