Characterization and modeling of capacitances in FD-SOI devices

Author:

Ben Akkez Imed,Cros Antoine,Fenouillet-Beranger Claire,Perreau P.,Margain A.,Boeuf Frederic,Balestra Francis,Ghibaudo Gérard

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Fenouillet-Beranger C et al. Fully-depleted SOI technology using high-k and single metal gate for 32nm node LSTP applications featuring 0179 lm2 6TSRAM bitcell. Proc IEEE IEDM’07; p. 267.

2. Weber O et al. High immunity to threshold voltage variability in undoped ultra-thin FDSOI MOSFETs and its physical understanding. Proc IEEE IEDM’08; p. 245.

3. Sugii N et al. Comprehensive study on V-th variability in silicon on thin BOX (SOTB) CMOS with small random-dopant fluctuation: finding a way to further reduce variation. Proc IEEE IEDM’08. p.249.

4. Fenouillet-Beranger C et al. FDSOI devices with thin BOX and ground plane integration for 32nm node and below. Proc ESSDERC’08; p. 206.

5. Noel J-P et al. A simple and efficient concept for setting up multi-VT devices in thin BOX fully-depleted SOI technology. Proc ESSDERC’09; p. 137.

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