Frequency dependence of the lifetime of a surface micromachined microengine driving a load-Reference-Cited by-同舟云学术

Frequency dependence of the lifetime of a surface micromachined microengine driving a load

Published:1999-03 Issue:3 Volume:39 Page:401-414
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Tanner Danelle M,Miller William M,Peterson Ken A,Dugger Michael T,Eaton William P,Irwin Lloyd W,Senft Donna C,Smith Norman F,Tangyunyong Paiboon,Miller Samuel L

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Design rules for a reliable surface micromachined IC sensor;Bart,1995

2. Reliability and quality assurance of MEMS technology;Cunningham,1996

3. Testing requirements and reliability issues encountered with micromachined structures.;Maudie,1995

4. Multi-level polysilicon surface-micromachining technology: applications and issues.;Sniegowski,1996

5. http://www.mdl.sandia.gov/Micromachine/.

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