Ultra-thin oxide reliability: searching for the thickness scaling limit-Reference-Cited by-同舟云学术

Ultra-thin oxide reliability: searching for the thickness scaling limit

Published:2000-04 Issue:4-5 Volume:40 Page:697-701
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Degraeve R,Kaczer B,Groeseneken G

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Degraeve R, et al. IEEE Trans Elec Dev 1998;45 (4):904–11

2. De Blauwe J, et al. IEDM Tech Dig 1996;343–6

3. Wu E, et al. IEDM Tech Dig 1998;187–90

4. Han LK, Bhat M, Wristers D, Fulford J, Kwong DL. IEDM Tech Dig 1994;617–20

5. Nigam T, Degraeve R, Groeseneken G, Heyns MM, Maes HE. Proceedings IRPS, 1999;381–8

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