A novel method for the deposition of Si–SiO2 superlattices-Reference-Cited by-同舟云学术

A novel method for the deposition of Si–SiO2 superlattices

Published:2000-04 Issue:4-5 Volume:40 Page:889-892
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Gourbilleau F,Voivenel P,Portier X,Rizk R

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. The structural and luminescence properties of porous silicon

2. The origin of photoluminescence from thin films of silicon‐rich silica

3. Photoluminescence and electroluminescence investigations at Ge-rich SiO2 layers

4. Blue luminescence from Si+‐implanted SiO2 films thermally grown on crystalline silicon

5. Ellipsometric spectroscopy study of photoluminescent Si/SiO2 systems obtained by magnetron co-sputtering

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