Author:
Dauderstädt U.A.,de Vries P.H.S.,Hiratsuka R.,Korvink J.G.,Sarro P.M.,Baltes H.,Middelhoek S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Integrated thermopile sensors;van Herwaarden;Sensors and Actuators A,1989
2. A novel accelerometer based on a silicon thermopile;Hiratsuka,1991
3. Silicon accelerometer based on thermopiles;Dauderstädt;Sensors and Actuators A,1995
4. IMEMS modelling;Korvink;Sensors Mater.,1994
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