A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry-Reference-Cited by-同舟云学术

A novel structure for three-dimensional silicon magnetic transducers to improve the sensitivity symmetry

Published:1996-09 Issue:3 Volume:56 Page:233-237
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lin Hsiao-Yi,Lei Tan Fu,Jeng Jz-Jan,Pan Ci-Ling,Chang Chun-Yen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. A 3-D vertical magnetic-field sensor in CMOS technology;Paranjape;Sensors and Actuators A,1992

5. Integrated 3-D magnetic sensor based on an n-p-n transistor;Kordic;IEEE Trans. Electron Device Lett., EDL-7,1986

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