Temperature compensation of an integrated low power inductive proximity microsensor

Author:

Passeraub Philippe A,Besse Pierre-André,Popovic Rade S

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. High resolution miniaturized inductive proximity sensor: characterization and application for step motor control;Passeraub;Sensors and Actuators, A,1998

2. Y.D. Coulon, C. Bourgeois, H.D. Lambilly, J. Bergqvist, F. Rudolf, Inductive Microsensor for Position and Speed, Vol. 2, Sensor 97, 8th International Fair and Congress for Sensors, Transducers and Systems, Nurnberg, May 13–15, 1997, pp. 31–36.

3. Metallic profile and coin imaging using an inductive proximity sensor microsystem;Passeraub;Sensors and Actuators, A,1998

4. V. Gupta, D.P. Neikirk, Design of an Eddy-Current Proximity Sensor using a Two-Coil Planar Transformer, Micromachined Devices and Components, Proc. SPIE 2642, Austin, Texas, USA, 23–24 October, 1995, pp. 173–182.

5. R. Vuillemin, B. Aeschlimann, M. Kuermmerle, J. Zoethout, T. Belfroid, H. Bleuler, A. Cassat, P. Passeraub, S. Hediger, P.-A. Besse, A. Argondizza, A. Tonoli, S. Carabelli, G. Genta, G. Heine, Low Cost Active Magnetic Bearings for Hard Disk Drive Spindle Motors, Proceedings of the ISMB-6, The Sixth International Symposium on Magnetics Bearings, Cambridge, MA, USA, Aug., 1998, pp. 3–9.

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