Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm-Reference-Cited by-同舟云学术

Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

Published:2000-05 Issue:1-3 Volume:83 Page:249-255
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Jeong Ok Chan,Yang Sang Sik

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Performance Simulation of Microminiaturized Membrane Pumps;Zengerle,1993

2. A Novel Piezoelectric Valve-less Fluid Pump;Steme,1993

3. An Electromagnetically Driven Microvalve;Yanagisawa,1993

4. Integrated Micro-Liquid Dosing System;Lammerink,1993

5. A Bidirectional Silicon Micropump;Zengerle,1995

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