Single-chip 3-D silicon Hall sensor-Reference-Cited by-同舟云学术

Single-chip 3-D silicon Hall sensor

Published:2000-05 Issue:1-3 Volume:82 Page:167-173
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schott Ch,Waser J.-M,Popovic R.S

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. A new integrated JFET 3-D magnetic-field sensor in VIP technology;Zongsheng;Sens. Actuators, A (Physical) A,1993

2. A novel 3-D magnetic-field sensor in standard CMOS technology;Misra;Sens. Actuators, A (Physical) A,1992

3. Microsystem for high accuracy 3D magnetic field measurement;Schott;Sens. Actuators, A (Physical) A,1998

4. A 3-D vertical Hall magnetic-field sensor in CMOS technology;Paranjape;Sens. Actuators, A (Physical) A,1992

5. New fully integrated 3-D silicon Hall sensor for precise angular-position measurements;Burger;Sens. Actuators, A (Physical) A,1998

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