VHF enhancement of micromechanical resonator via structural modification-Reference-Cited by-同舟云学术

VHF enhancement of micromechanical resonator via structural modification

Published:2002-01 Issue:1 Volume:96 Page:67-77
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Loke Y.C.,Liew K.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

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2. A.-C. Wong, H. Ding, C.T.-C. Nguyen, Micromechanical mixer and filters, technical digest, in: Proceedings of the IEEE International Devices Meeting, San Franscisco, California, 6–9 December 1998, pp. 471–474.

3. K. Wang, Y. Yu, A.-C. Wong, C.T.-C. Nguyen, VHF free–free beam high Q micromechanical resonators, technical digest, in: Proceedings of the 12th International IEEE Micro Electro Mechanical Systems Conference, Orlando, FL, 17–21 January 1999, pp. 453–458.

4. S. Timoshenko, D.H. Young, W. Weaver, JR, Vibration Problems in Engineering, Fourth Edition, John Wiley Sons, 1974.

5. MCNC/MUMPS, Consolidated Micromechanical Element Library (CAMEL), Camel User Guides, Website: http://www.memsrus.com/cronos/.

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