System level simulation of a double stator wobble electrostatic micromotor-Reference-Cited by-同舟云学术

System level simulation of a double stator wobble electrostatic micromotor

Published:2002-06 Issue:3 Volume:99 Page:312-320
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Endemaño Aitor,Desmulliez Marc P.Y.,Dunnigan Matthew

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control;Samper;J. Microelectromech. Syst.,1998

2. The LIGA technique and its potential for microsystems—a survey;Bacher;IEEE Transact. Indust. Electron.,1995

3. An electrostatic harmonic microactuator for arterial plaque removal;Shea;J. Micromech. Microeng.,1995

4. S.-J. Yun, E.-W. Lee, D.-J. Lee, Torque Characteristics Analysis of Harmonic Side Drive Motor by Conformal Mapping Transactions of the Korean Institute of Electrical Engineers, Vol. 48, No. 3, 1999, pp. 104–109.

5. R.V. Churchill, J.W. Brown, Complex Variables and Applications, McGraw-Hill, New York, 1984.

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