Author:
Oka Toru,Nakajima Hajime,Tsugai Masahiro,Hollenbach Uwe,Wallrabe Ulrike,Mohr Jürgen
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. Optical micro encoder with sub-micron resolution using VCSEL;Miyajima;Sens. Actuators A,1998
2. R. Sawada, Integrated Optical Encoder, Transducers ’95, Stockholm, Sweden, 25–29 June 1995, pp. 281–284.
3. Micro-optical distance sensor fabricated by deep X-ray lithography;Nakajima;Opt. Eng.,2001
4. Microspectrometer fabricated by the LIGA process;Müller;Interdisciplinary Sci. Rev.,1993
5. J. Mohr, J. Göttert, A. Müller, P. Ruther, K. Wengeling, Micro-Optical and Opto-Mechanical Systems Fabricated by LIGA Technique, vol. 3008, SPIE, San Jose, USA, 10–12 Feberuary 1997, pp. 273–278.
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