Author:
Klaassen Erno H,Reay Richard J,Storment Christopher,Kovacs Gregory T.A
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Thermoelectric infrared sensors by CMOS technology;Lenggenhager;IEEE Electron Device Lett.,1992
2. CMSOS membrane infrared sensors and improved TMAHW etchant;Lenggenhager,1994
3. A new approach for the fabrication of micromechanical structures;Parameswaran;Sensors and Actuators,1989
4. Study of electrochemical etch-stop for high-precision thickness control of silicon membranes;Kloech;IEEE Trans. Electron Devices,1989
5. Available from In Vivo Metrics, PO Box 249, Healdsburg, CA 95448.
Cited by
35 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献