Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass

Author:

Maenaka K,Fujita T,Konishi Y,Maeda M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Micromachined gyroscopes;Soderkvist;Sensors and Actuators A,1994

2. Silicon monolithic micromechanical gyroscope;Greiff,1991

3. A micromachined comb-drive tuning fork rate gyroscope;Bernstein,1993

4. A study of silicon angular rate sensors using anisotropic etching technology;Maenaka;Sensors and Actuators A,1994

5. Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection;Hashimoto,1994

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