Novel prevention method of stiction using silicon anodization for SOI structure

Author:

Matsumoto Y,Shimada T,Ishida M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

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3. A capacitive accelerometer using SDB-SOI structure;Mastumoto;Sensors and Actuators A,1996

4. T.J. Brosihan, J.M. Bustillo, A.P. Pisano, R.T. How, Embedded Interconnect and Electrical Isolation for High-aspect-ratio, SOI Inertial Instruments, Proc. 1997 Int. Conf. Solid State Sensors and Actuators (Transducers'97), 1997, pp. 637–640.

5. Critical review: adhesion in surface micromechanical structures;Maboudian;J. Vac. Sci. Technol. B,1997

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