Sensors and actuators on non-planar substrates-Reference-Cited by-同舟云学术

Sensors and actuators on non-planar substrates

Published:1999-03 Issue:1-2 Volume:73 Page:80-88
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Wen J.,Mai John D.,Ho Chih-Ming

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. C.M. Ho, et al., Control of Macro Machine by Micro Actuators, Bull. of 47th Ann. Meet. of the Div. of Fluid Dyn. of the APS, Atlanta, Nov. 1994.

2. Analog VLSI system for active drag reduction;Gupta;IEEE Micro.,1996

3. S.C. Jacobsen, M. Olivier, Integrated Sensor Network Project, MEMS PI Meet. Rep. Sarcos Res., July 1995–Jan. 1996.

4. W.F. Dunn, MEMS-Based Smart Tires, 1st Quart. Tech. Report #GDYR1-15-96S, The Goodyear Tire and Rubber, Sept. 1995.

5. Extreme selectivity in the lift-off of epitaxial GaAs films;Yablonovitch;Appl. Phys. Lett.,1987

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