CMOS-compatible capacitive high temperature pressure sensors-Reference-Cited by-同舟云学术

CMOS-compatible capacitive high temperature pressure sensors

Published:2000-08 Issue:1-3 Volume:85 Page:147-152
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kasten Klaus,Amelung Jörg,Mokwa Wilfried

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Research activity on high-temperature electronics and its future application in space exploration in Japan;Tajima,1994

2. High temperature automotive electronics: trends and challenges;Erskine,1994

3. 6H–SiC pressure sensor operation at 600°C;Ned,1998

4. Silicon carbide, a high temperature semiconductor;Powell,1983

5. SOI, SIMOX: from bulk to surface micro-machining, a new age for silicon sensors and actuators;Diem;Sens. Actuators, A,1995

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