Realization of polycrystalline silicon magnetic sensors

Author:

Le Bihan F.,Carvou E.,Fortin B.,Rogel R.,Salaün A.C.,Bonnaud O.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. A method of measuring specific resistivity and Hall effect of discs of arbitrary shape;Van Der Pauw;Philips Res. Rep.,1958

2. H. Weiss, Structure and Applications of Galvanomagnetic Devices, Pergamon Press, NewYork, 1969.

3. A 3-D vertical hall magnetic-field sensor in CMOS technology;Paranjape;Sens. Actuators A,1992

4. MOS magnetic current sensor based on standard CMOS process;Yang;Electron. Lett.,1997

5. R.S. Popovic, Hall Effect Devices, Adam Hilger, Bristol, 1991.

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