Author:
Chen Gin-Shin,Ju Ming-Shaung,Fang Yean-Kuen
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Plasticity for Structural Engineers;Chen,1991
2. Silicon as a mechanical material;Petersen;Proc. IEEE,1982
3. Semiconductor Sensor;Sze,1994
4. Fundamentals of Microfabrication;Madou,1997
5. A capacitive silicon pressure sensor with low TC0 and high long-term stability;Hanneborg;Sens. Actuators A,1990
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11 articles.
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