Author:
Chen Gin-Shin,Ju Ming-Shaung,Fang Yean-Kuen
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Fundamentals of Microfabrication;Madou,1997
5. A capacitive silicon pressure sensor with low TC0 and high long-term stability;Hanneborg;Sens. Actuators A,1990
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