Development of a levitated micromotor for application as a gyroscope

Author:

Shearwood C,Ho K.Y,Williams C.B,Gong H

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Micromachined Inertial Sensors;Yazdi;Proc. IEEE,1998

2. Levitation of a micromachined rotor for application in a rotating gyroscope;Shearwood;Electron. Lett.,1995

3. Modelling and Testing of a Frictionless Levitated Micromotor;Williams;Sens. Actuators, A,1997

4. C.B. Williams, Micro-Rotational and Linear Inertial Transducers, PhD Thesis, Sheffield University, (1998).

5. C. Shearwood, R.B. Yates, P.H. Mellor, C.B. Williams, Improvements in or relating to Levitation Systems, European Patent Serial No: EP 0819337, USA Patent Application Serial No.: 08/952,335, (1998).

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