Author:
Rossi Carole,Temple-Boyer Pierre,Estève Daniel
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. A substrate for thin-film gas sensors in microelectronic technology;Dibbern;Sensors and Actuators B,1990
2. Applications of thermal silicon sensors on membranes;Gajda;Sensors and Actuators A,1995
3. An integrated low-power thin-film gas sensor on silicon;Demarne;Sensors and Actuators,1988
4. Floating-membrane thermal vacuum sensor;Van Herwaarden;Sensors and Actuators,1988
5. Thin film heater on a thermally isolated microstructure;Oh,1992
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