Author:
Park Daeseon,Yeo In-Ho,Lee Jiseon,Kim Hyojeon,Choi Seungju,Kang Seoktae
Funder
KEITI
National Research Foundation of Korea
Subject
Mechanical Engineering,Water Science and Technology,General Materials Science,General Chemical Engineering,General Chemistry
Reference49 articles.
1. Semiconductor Market Size, Share & COVID-19 Impact Analysis, by Components, By Application and Regional Forecast, 2021-2028, in, Fortune Business Insights.
2. Ultrapure water for advance semiconductor manufacturing: challenges and opportunities;Libman;ECS Trans.,2015
3. Quantifying spatiotemporal impacts of the interaction of water scarcity and water use by the global semiconductor manufacturing industry;Frost;Water Resources and Industry,2019
4. Environmental data and facts in the semiconductor manufacturing industry: an unexpected high water and energy consumption situation;Wang;Water Cycle,2023
5. Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industries;A. Standard, D5127–13,2013