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Performance evaluation of multi-scale data fusion methods for surface metrology domain

  • Published:2013-10 Issue:4 Volume:32 Page:514-522
  • ISSN:0278-6125
  • Container-title:Journal of Manufacturing Systems
  • language:en
  • Short-container-title:Journal of Manufacturing Systems

Author:

Ramasamy Suresh K.,Raja Jayaraman

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Hardware and Architecture,Software,Control and Systems Engineering

Reference21 articles.

1. Dimensional micro and nano metrology;Hansen;Ann CIRP,2006

2. Zygo.com [Internet]. ZYGO Metrology Services Division; [cited February 2, 2013]. http://www.zygo.com/?/met/profilers/.

3. Multi-scale data fusion for surface metrology;Ramasamy,2011

4. Multi-Sensor Data Fusion in Surface and Dimensional Metrology Domains;Ramasamy,2012

5. Performance Evaluation of Data Fusion Metrics;Ramasamy,2012

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