Author:
Aoqui Shin-ichi,Miyata Hisatomo,Ohshima Tamiko,Ikegami Tomoaki,Ebihara Kenji
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference17 articles.
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5. S. Aoqui, T. Ikegami, K. Ebihara, Proceedings of 14th International Symposium on Plasma Chemistry, Vol. 3, pp. 1117-1122 (1999).
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