Micro rapid prototyping system for micro components-Reference-Cited by-同舟云学术

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Micro rapid prototyping system for micro components

Published:2002-12 Issue: Volume:420-421 Page:515-523
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Li Xiaochun,Choi Hongseok,Yang Yong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. Microsystem Technology and Microrobotics;Fatikow,1997

2. Microactuators: Electrical, Magnetic, Thermal, Optical, Mechanical, Chemical and Smart Structures;Tabib-Azar,1998

3. J. Ding, Y. Meng, S. Wen, Annual Proceedings of Reliability Physics Symposium, n 01, CH3716, pp. 106–111

4. Process overviews;Prinz,1997

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