Influences of bias voltage on the crystallographic orientation of AlN thin films prepared by long-distance magnetron sputtering-Reference-Cited by-同舟云学术

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Influences of bias voltage on the crystallographic orientation of AlN thin films prepared by long-distance magnetron sputtering

Published:2003-04 Issue:1-2 Volume:429 Page:1-4
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Chu A.K.,Chao C.H.,Lee F.Z.,Huang H.L.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. X-band thin film acoustic filters on GaAs

2. High-Q microwave acoustic resonators and filters

3. Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

4. Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films

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1. Reactive magnetron sputtered AlN thin films: structural, linear and nonlinear optical characteristics;Journal of Materials Science: Materials in Electronics;2023-05

2. Substrate angle-induced fully c-axis orientation of AlN films deposited by off-normal DC sputtering method;Rare Metals;2021-02-26

3. The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films;Journal of Materials Science: Materials in Electronics;2020-11-13

4. FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices;Diamond and Related Materials;2020-02

5. Piezoelectric MEMS based acoustic sensors: A review;Sensors and Actuators A: Physical;2020-01

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