Author:
Shibagaki Shigeki,Koga Akihiro,Shirakawa Yoshinori,Onishi Hiroko,Yokokawa Harumi,Tanaka Junzo
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Proc. 15th Symp. on ULSI Ultra Clean Technology;Isagawa,1992
2. Experimental results and their analysis will be published in detail elsewhere in relation to the texture and thickness of each sublayer.
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