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Mechanical stress in micromachined components caused by humidity-induced in-plane expansion of thin polymer films

  • Published:1998-01 Issue:1-2 Volume:312 Page:232-239
  • ISSN:0040-6090
  • Container-title:Thin Solid Films
  • language:en
  • Short-container-title:Thin Solid Films

Author:

Buchhold R.,Nakladal A.,Gerlach G.,Sahre K.,Eichhorn K.-J.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Recent advances in photosensitive polyimides;Ahne;Polymers Adv. Technol.,1993

2. Sorption and diffusion of water vapor in polyimide films;Okamoto,1996

3. Humidity-induced volume expansion of polyimide films and its application to humidity sensing effects;Sager,1994

4. Moisture-sensitive mechanical properties of thin polyimide-layers and their application in silicon micromechanics;Sager,1995

5. Swelling behavior of an aromatic polyimide;Gattiglia;J. Polym. Sci. B,1989

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