Novel patterning method for the electrochemical production of etched silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. Electrolytic Shaping of Germanium and Silicon
2. Micromachining applications of porous silicon
3. Efficient visible electroluminescence from highly porous silicon under cathodic bias
4. A new dielectric isolation method using porous silicon
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3. Investigations into the electrochemical etching process of p-type silicon using ethanol-surfactant solutions;AIP Conference Proceedings;2017
4. Optimized plasma-polymerized fluoropolymer mask for local porous silicon formation;Journal of Applied Physics;2016-06-07
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