Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: a CO/CH4 high performance sensor-Reference-Cited by-同舟云学术

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Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: a CO/CH4 high performance sensor

Published:2001-07 Issue:2 Volume:391 Page:265-269
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Cerdà J,Cirera A,Vilà A,Cornet A,Morante J.R

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference37 articles.

1. Materials selection for semiconductor gas sensors

2. Selectivity in semiconductor gas sensors

3. Selectivity studies on tin oxide-based semiconductor gas sensors

4. The effect of Pt and Pd surface doping on the response of nanocrystalline tin dioxide gas sensors to CO

5. Specific palladium and platinum doping for SnO2-based thin film sensor arrays

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