Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference86 articles.
1. Thin Film Processes IL,1991
2. Chemical Vapor Deposition – Principles and Applications,1993
3. T. Kodas, M. Hampden-Smith. The Chemistry of Metal CVD, VCH, Weinheim, Germany, 1994.
4. CVD of Non-metals, VCH,1996
5. CVD of Compound Semiconductors;Jones,1997
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